发明名称 |
PROCESS FOR PREPARING SUPERCONDUCTIVE THIN FILMS |
摘要 |
A process is provided for preparing thin films of a composite oxide superconductor on a plurality of substrates by sputtering, wherein film formation is effected with said plurality of substrates being arranged along a side wall of an imaginary solid that is defined by projecting the effective area of a target surface for film formation in a direction normal to the target surface.
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申请公布号 |
CA2044941(A1) |
申请公布日期 |
1991.12.21 |
申请号 |
CA19912044941 |
申请日期 |
1991.06.19 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
ITOZAKI, HIDEO;HATTORI HISAO;HARADA, KEIZO;MATSUURA, TAKASHI |
分类号 |
C01B13/14;C01G1/00;C01G3/00;C23C14/34;C23C14/50;C30B23/08;C30B29/22;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):H01L39/24 |
主分类号 |
C01B13/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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