发明名称 ALIGNMENT MECHANISM AND INTER-ATOMIC FORCE MICROSCOPE USING SAME
摘要 PURPOSE:To easily position a lever at a probe by inserting a jig into plural holes formed at the position of a fixation body corresponding to the flank position of a lever holder and moving and positioning the lever holder by the jig. CONSTITUTION:The base 41 of a fine moving mechanism 40 is turned around a shaft 42 as shown by the arrow (a). In this state, a micrometer head 43 is driven to move the fine adjusting mechanism 45 and probe 46 in one body. This movement reduces the interval between the probe 46 and lever 50 to about 100mum and the mechanism 45 is clamped with a screw 46 and fixed to a spring mechanism 44. Then the position of the probe 46 and lever 50 are observed through an optical microscope. In this state, the jig 90 is inserted into the hole 54 and the lever holder 51 is moved by the 'principle of level' of this jig 90. This movement positions the lever 50 at the probe 46. In this case, the holder 51 is clamped with the screw 53, so high rigidity is obtained and fine positioning becomes possible.
申请公布号 JPH03291502(A) 申请公布日期 1991.12.20
申请号 JP19900094702 申请日期 1990.04.10
申请人 TOSHIBA CORP 发明人 ISHIDA FUMIHIKO;HAYASHI MASAKAZU;YASUNAGA TAMIYOSHI
分类号 G01B7/34;G01N37/00;G01Q60/10;G01Q60/24;G01Q60/38;G01Q70/02 主分类号 G01B7/34
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