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发明名称
SOI TYPE THIN FILM TRANSISTOR AND MANUFACTURE THEREOF
摘要
申请公布号
JPH03289138(A)
申请公布日期
1991.12.19
申请号
JP19900090444
申请日期
1990.04.06
申请人
CANON INC
发明人
NAKAYAMA JUN;KOIZUMI TORU
分类号
H01L29/78;H01L21/336;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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