| 发明名称 |
Process for preparing superconducting oxide thin films. |
| 摘要 |
<p>A laser ablation process for preparing superconducting oxide thin films comprises ablating a target surface with pulsed laser beam to cause deposition of target molecules on a substrate. The incident laser beam on the target surface has an energy of at least 5 J/cm<2> per pulse.</p> |
| 申请公布号 |
EP0461645(A2) |
申请公布日期 |
1991.12.18 |
| 申请号 |
EP19910109666 |
申请日期 |
1991.06.12 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAGAISHI, TATSUOKI;HATTORI, HISAO;ITOZAKI, HIDEO |
| 分类号 |
C01G1/00;C04B41/87;C23C14/28;H01L39/24 |
主分类号 |
C01G1/00 |
| 代理机构 |
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代理人 |
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