发明名称 MONOCRYSTAL INGOT TRANSFER/PERIPHERAL FACE GRINDING DEVICE
摘要 PURPOSE:To simplify the structure of the whole body, by moving along a guide means the monocrystal ingot transfer/posture adjusting device which transfers a monocrystal ingot and detaches this monocrystal ingot from a monocrystal ingot peripheral face grinding device. CONSTITUTION:A guide mean 16A is arranged along the monocrystal ingot peripheral face grinding devices 221A - 225A which are arranged in parallel in plural sets. Moreover, a monocrystal ingot transfer/posture adjusting device 20A equipped with the hands 206, 207 holding the monocrystal ingot, a travel part 201 moving along the guide mean 16A and the intermediate part 202 moving a head so that the grinding rotary center of the both end faces of the monocrystal ingot provided between the hand and travel part and held by the hand may coincide with on the rotating shaft center line of the rotating clamp shaft of the monocrystal ingot peripheral face grinding device, is arranged.
申请公布号 JPH03287371(A) 申请公布日期 1991.12.18
申请号 JP19900085937 申请日期 1990.03.31
申请人 SHIN ETSU HANDOTAI CO LTD 发明人 IBE HIROYUKI
分类号 B23Q17/24;B23Q1/00;B23Q1/25;B23Q1/48;B23Q7/04;B24B41/06;B24B49/12;C30B35/00;H01L21/304 主分类号 B23Q17/24
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