| 摘要 |
PURPOSE:To make possible a developing of a resist without human intervention during a process by a method wherein a dimension of a resist is automatically measured, where the developing of the resist is completed or not is decided and if the developing is uncompleted, the resist is subject to additional developing for a necessary time. CONSTITUTION:The number of rotations of a table 12, the amount of a developing solution, the amount of a rising solution and the like are registered in an information processing part 16, a table drive part 14 and a developing solution feed part 15 are made to operate according to these of the number, the amounts and the like and a substrate 11 to be developed is developed. When the developing is finished, a drive signal for making an arm 1 operate and a signal for opening a shutter 2 are respectively fed to an arm drive part 3 and a shutter drive part 4 from the part 16. Thereby, the shutter 2 of a developing part is first opened, then, the drive part 3 makes the arm 1 operate and the substrate 11 is moved to an optical dimension measuring device 5. In the device 5, the substrate 11 is fed on a table 17 of the device 5, a certain determined dimension of a resist on the substrate 11 is measured by an optical system 7 and when a developing of the resist is insufficient, the substrate 11 is again moved to the table 12 and an additional developing is performed. |
