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经营范围
发明名称
Plasma processing apparatus
摘要
申请公布号
GB2244721(A)
申请公布日期
1991.12.11
申请号
GB19910009602
申请日期
1991.05.03
申请人
* NORTHERN TELECOM LIMITED
发明人
RUDOLF AUGUST HERBERT * HEINECKE;GEOFFREY ALAN * SCARSBROOK
分类号
C23C16/30;C23C16/509;C23C16/515
主分类号
C23C16/30
代理机构
代理人
主权项
地址
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