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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03278583(A)
申请公布日期
1991.12.10
申请号
JP19900079884
申请日期
1990.03.28
申请人
NEC CORP
发明人
SATO NOBORU
分类号
H01L21/8247;H01L29/788;H01L29/792
主分类号
H01L21/8247
代理机构
代理人
主权项
地址
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