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发明名称
LASER CVD APPARATUS
摘要
申请公布号
JPH03278520(A)
申请公布日期
1991.12.10
申请号
JP19900077116
申请日期
1990.03.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
GOTO YOSHIYUKI;OMINE MEGUMI;DOI MAKOTO
分类号
H01L21/205;H01L21/263;H01L21/268;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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