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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH03278533(A)
申请公布日期
1991.12.10
申请号
JP19900079213
申请日期
1990.03.28
申请人
NEC CORP
发明人
YAMADA YOSHIYUKI
分类号
H01L21/76;H01L21/3205;H01L21/768;H01L23/52;H01L23/522
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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