RHEED MICROSCOPE DEVICE OF SCANNING TYPE,申请号JP19900070562-传众专利搜索

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发明名称	RHEED MICROSCOPE DEVICE OF SCANNING TYPE
摘要
申请公布号	JPH03272555(A)	申请公布日期	1991.12.04
申请号	JP19900070562	申请日期	1990.03.20
申请人	ULVAC JAPAN LTD;RES DEV CORP OF JAPAN	发明人	SHIMIZU SABURO;YAMAKAWA HIROYUKI;FUWA KO;YANAGIDA HIROSHI;YAMAMURO KAZUHIRO;SHIGETOMI JUNICHI
分类号	H01J37/22;H01J37/295	主分类号	H01J37/22
代理机构		代理人
主权项
地址

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