| 摘要 |
PURPOSE:To form a ceramic heater, whose resistance is more stable, at high speed and with ease by forming a groove equivalent to a heater pattern, filling this groove with Ti, and using infrared laser to nitride Ti in nitrogen gas atmosphere so that resistor film for a heater is formed. CONSTITUTION:An insulation member 1 whose groove is filled with Ti is arranged in a chamber 10 where a desired atmosphere, for instance, can be made, so that a nitrogen gas atmosphere is formed in the chamber 10 by use of a vacuum exhaust system 12, and a nitrogen gas introducing portion 11. The diameter of the beam of an infrared laser 4 emitted from an infrared laser oscillator 9 is set equal to or smaller than the width of a pattern formed on the insulation member 1. Next, the infrared laser 4 is introduced in the chamber through the infrared ray transmission window installed in the chamber 10 to irradiate Ti in a pattern groove. Accordingly, the accuracy of the pattern depends on the groove-forming accuracy so as to decrease dispersion of accuracy in the pattern and a ceramic heater (TiN) which is stable at a high temperature can be obtained with great reliability. |
