发明名称 PHTOERASABLE DYE COMPOSITION AND PATTERN FORMING METHOD USING SAME
摘要 <p>PURPOSE:To eliminate difficulty in liquid feeding and waste of materials by using a composition of a specified disilane derivative as a photoerasable dye, a specified polysiloxane as a binder, component, and an organic solvent as their solvent. CONSTITUTION:The disilane derivative to be used as the photoerasable dye is represented by at least formula I, and the polysiloxane to be used as the binder component is represented by formula II, and the composition comprises the derivative and the polysiloxane and the organic solvent. In formulae I and II each of R<1>-R<6> is arkyl, but at least any 2 of them are aryl, and each of R<21> and R<22> is alkyl or phenyl, thus permitting difficulty of liquid feeding and waste of materials induced by this to be eliminated.</p>
申请公布号 JPH03271745(A) 申请公布日期 1991.12.03
申请号 JP19900072648 申请日期 1990.03.22
申请人 SONY CORP 发明人 TSUMORI TOSHIRO
分类号 G03F7/075;G03F1/68;G03F1/80;G03F7/095;G03F7/26;H01L21/027;H01L21/30 主分类号 G03F7/075
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