发明名称 |
PROCESS FOR THE PRODUCTION OF SEMICONDUCTOR MATERIALS |
摘要 |
A PROCESS FOR THE PRODUCTION OF SEMICONDUCTOR MATERIALS An improvement in a process for the production of semiconductor materials from the vapor decomposition of a precursor compound of the desired semiconductor material and the deposition of the desired semiconductor material. The improvement comprises the heating of the exterior surface of a metallic enclosure of a reactor to facilitate preheating thin rods of the semiconductor material, the rods supplying the heat for decomposition and acting as a substrate for deposition, to a temperature of about 250.degree.C. to render the thin rods conductive enough to effectively pass an electric current. |
申请公布号 |
CA1292663(C) |
申请公布日期 |
1991.12.03 |
申请号 |
CA19870538322 |
申请日期 |
1987.05.29 |
申请人 |
ARVIDSON, ARVID N. |
发明人 |
ARVIDSON, ARVID N.;GREENE, MICHAEL H.;MCCORMICK, JAMES R. |
分类号 |
C23C16/46 |
主分类号 |
C23C16/46 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|