APPARATUS FOR MEASURING BREAKDOWN PLASMA

摘要

Apparatus for measuring breakdown plasma, comprising an irradiating device for irradiating a sample with a focused light beam and for causing breakdown of a ultrafine particle to be measured in the sample at the focused beam region to change the particle into plasma; a pair of electrodes arranged on opposite sides of the focused region of the beam; and a device for measuring an electrical resistance between the electrodes under a condition where the breakdown plasma is produced between the electrodes and for determining a diameter of the particle according to the measured electrical resistance serves for accurate measurement of the diameter of the ultrafine particle in the sample.