| 摘要 |
<p>PURPOSE:To prevent an effect of the turbulence of air on a delivering wafer even when passed by another trucks by arranging a parting plate between two parallel auxiliary transferring paths brought to a selectively movable state in the orthogonal direction to a transferring path on the main line side and moving the parting plate together with the auxiliary transferring paths. CONSTITUTION:Since a parting plate 7 is mounted between two auxiliary transferring paths 5 in parallel with the transferring path 1 of a main line so as not to get trouble to the passage of an overrunning truck in a traverser 6 with both auxiliary transferring paths in a transfer tube 4, the inside of a delivery station 3 and the main line side are partitioned by the parting plate 7 even when the overrunning truck passes on the main line of the transferring path when one transfer truck conducts the delivery work of wafers in the delivery station 3, thus preventing an effect on the inside of the station 3 of the turbulence of air in the main line, then smoothly delivering the wafers without contamination.</p> |
