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发明名称
FILM CARRIER
摘要
申请公布号
JPH03270031(A)
申请公布日期
1991.12.02
申请号
JP19900069119
申请日期
1990.03.19
申请人
FUJITSU LTD
发明人
ISHIKURI MASAHIKO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
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