| 摘要 |
PURPOSE:To omit attachment of a tube and to simplify the structure, by opening a liquid path on the high pressure side of a diaphragm on the lower side of a sensor, opening a liquid path on the low pressure side on the upper side of the sensor, and measuring the differential pressure. CONSTITUTION:A pressure is applied to a diaphragm 24 through a port 28 on the high pressure side. A pressure is applied to a diaphragm 25 through a port 29 on the low pressure side. The part between the diaphragms 24 and 25 on both sides is partitioned by a control diaphragm 32. Both sides are filled with a transmitting liquid (silicon and the like). The pressure on the high pressure side is transmitted to the lower side of a sensor 45 of the diaphragms by the transmitting liquid path 39, an inner chamber 33 and a liquid path 35. The pressure on the low pressure side is transmitted to the upper side of the sensor 45 through a liquid path 40, an inner chamber 34, a liquid path 36 and an annular path 48 between an outer tube 46 and a sensor supporting member 41. The differential pressure is detected by the sensor 45 as an electric signal. Since the openings of the liquid paths on high pressure side and low pressure side are provided at the upper and lower side of the sensor, attachment of a tube is omitted, welding parts are reduced and assembling becomes easy. |
