发明名称 ELECTRICALY CONDUCTIVE RESIST MATERIAL
摘要 PURPOSE:To prevent charge-up in an ion treating stage by incorporating a quat. ammonium salt and a high dielectric. CONSTITUTION:A quat. ammonium salt and a high dielectric are incorporated. The quat. ammonium salt is that of a compd. such as an org. acid (monocarboxylic acid (formic acid, acetic acid, etc.), dicarboxylic acid (phthalic acid, etc.), sulfonic acid (toluenesulfonic acid, etc.) etc.), a mineral acid (hydrochloric acid, sulfuric acid, etc.), or a boron complex (ethylene glycol-boron complex, etc.), preferably monocarboxylic acid or dicarboxylic acid. The high dielectric may be polyethylene oxide or polypropylene oxide, accelerates the dissociation of the salt, facilitates the transfer of ions by the segment motion of the polymer and increases electrical conductivity. Charge-up in an ion treating stage can be prevented.
申请公布号 JPH03267941(A) 申请公布日期 1991.11.28
申请号 JP19900069027 申请日期 1990.03.19
申请人 SANYO CHEM IND LTD 发明人 KISHIKI HIROSHI
分类号 G03F7/004;H01L21/027 主分类号 G03F7/004
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