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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03266438(A)
申请公布日期
1991.11.27
申请号
JP19900063994
申请日期
1990.03.16
申请人
OKI ELECTRIC IND CO LTD
发明人
YAMAGUCHI HIROSHI
分类号
H01L21/3205;H01L21/28;H01L21/285
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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