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发明名称
FABRICATION OF SEMICONDUCTOR DEVICES USING PHOSPHOSILICATE GLASSES
摘要
申请公布号
EP0396307(A3)
申请公布日期
1991.11.27
申请号
EP19900304433
申请日期
1990.04.25
申请人
AMERICAN TELEPHONE AND TELEGRAPH COMPANY
发明人
FLEMING, DEBRA ANNE;JOHNSON, DAVID WILFRED, JR.;SINGH, SHOBHA;VANUITERT, LEGRAND G.;ZYDZIK, GEORGE J.
分类号
C03C3/062;C03C3/097;H01L21/314;H01L21/316;(IPC1-7):H01L21/316
主分类号
C03C3/062
代理机构
代理人
主权项
地址
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