| 摘要 |
PURPOSE:To dispense with the cleaning/fitting/removing work of cutoff means and prevent the occurrence of a memory effect by forming the cutoff means provided with passing holes for passing an emission energy body on a cutoff member for cutting off emission grains into a windable belt shape. CONSTITUTION:A primary ion beam generated from a primary ion generating source 4 is focused by a lens 7 and radiated on the surface of a sample 2, and secondary ions excited from the surface of the sample 2 are spattered. The secondary ions emitted from the sample 2 reach a cutoff means 6, and only the secondary ions passing the passing holes of a cutoff member 6a reach a mass spectrograph 5. The cutoff means 6 is formed into a windable belt shape, and multiple passing holes 10 for passing secondary ions are formed on the cutoff member 6a for cutting off the emission grains such as the secondary ions emitted from the sample 2. The cutoff means 6 is preferably made of a rollable metal with a high melting point, e.g. Mo or Ta. |
