| 摘要 |
PURPOSE:To certainly prevent the positional displacement of the X-ray optical element on a support means by using metal bellows as a connection means when a vacuum chamber and the support means supporting the X-ray optical element such as a crystal sample are connected CONSTITUTION:The third support means 17 for supporting a sample 3 is constituted of the columnar support 32 fixed to a base stand 18 and the support table 33 integrated therewith and a sample stand 8 is mounted on the support table 33. The first support means 15 and the second support means 16 are arranged around the support 32 but metal bellows 23 are used in order to connect the means 15, 16 to the support 32. The movement of the bellows 23 themselves is prescribed by the stoppers 31 provided to the first and second support means 15, 16 but, in this constitution, the stoppers are not provided to the bellows 23 and the bolts 34 allowed to pierce through upper flanges 25 in place of the stoppers are extended to lower flanges 25b to be fixed thereto and allowed to function as the stoppers. By this constitution, even when a chamber is deformed by the effect of vacuum, this deformation is absorbed by the bellows. |
