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发明名称
SPUTTERING DEVICE FORMED BY USING DIPOLE RING TYPE MAGNETIC CIRCUIT
摘要
申请公布号
JPH03257159(A)
申请公布日期
1991.11.15
申请号
JP19900053033
申请日期
1990.03.05
申请人
SHIN ETSU CHEM CO LTD
发明人
OHASHI TAKESHI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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