摘要 |
<p>PURPOSE:To suppress the force applied on an IC package to a small value and prevent the lead of the IC package from being bent even if a transport device such as a robot overruns, by installing the second cylinder body which is fitted in shiftable manner towards the center axis direction of the first cylinder body and sucks the IC package by the top edge, on the first cylinder body. CONSTITUTION:When an IC package 8 is sucked to the top edge of a movable part (second cylinder body) 3 by the suction force of a vacuum device, the movable part 3 retracts to a supporting part 2, and stops at one edge of the shift range. Further, when the suction by the vacuum device is suspended, the movable part 3 slowly shifts to the other edge of the shift range reversely to the case of suction by an urging force, and the IC package 8 is separated. Further, when a transport device overruns at the suction position or separating position of the IC package 8, the movable part 3 retracts to a supporting part (first cylinder body) 2, and the force applied on the IC package 8 is suppressed to the small value.</p> |