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发明名称
SYNTHETIC SILICA GLASS ARTICLE FOR DOPANT-DIFFUSION PROCESS IN SEMICONDUCTORS
摘要
申请公布号
US5063181(A)
申请公布日期
1991.11.05
申请号
US19890427792
申请日期
1989.10.26
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
TAKITA, MASATOSHI;SHIMIZU, TAKAAKI
分类号
C03B8/02;C03B19/09;C03B19/10;C03B20/00;C03C1/00;C03C3/06;C30B31/10;C30B31/14;C30B35/00
主分类号
C03B8/02
代理机构
代理人
主权项
地址
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