| 摘要 |
PURPOSE:To prevent the uneven wear of the member to be worked by providing an automatic aligning ball bearing on the pad for polishing. CONSTITUTION:Even in the case of an error being caused in the positional relation of a polishing pad 5 and the member 1 to be worked, an automatic aligning ball bearing 2 is actuated in the direction cancelling this error. The member 1 to be worked is thus automatically prevented from the uneven wear due to a partial contact. Also, the pressing pressure of the pad face 10a of the polishing pad 5 is adjusted by being measured in process by a pressure sensor 14. The pattern of this pressing pressure is stabilized, therefore, and the member 1 to be worked is stabilized in its surface roughness. Consequently the member 1 to be worked is correctly polished by making the removal for inspection work under polishing unnecessary. |
