VERFAHREN ZUM HERSTELLEN VON DURCHGANGSLEITUNGEN IN EINER PLANAREN STRUKTUR.,申请号DE19853584191-传众专利搜索

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发明名称	VERFAHREN ZUM HERSTELLEN VON DURCHGANGSLEITUNGEN IN EINER PLANAREN STRUKTUR.
摘要
申请公布号	DE3584191(D1)	申请公布日期	1991.10.31
申请号	DE19853584191	申请日期	1985.06.15
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US	发明人	LEARY-RENICK, PAMELA ANNE, FISHKILL NEW YORK 12524, US;STRINIVASAN, RANGASWAMY, YORKTOWN HEIGHTS NEW YORK 10598, US
分类号	H01L23/12;H01L21/48;H01L23/538;H05K1/03;H05K1/11;H05K3/00;H05K3/46;(IPC1-7):H01L23/52	主分类号	H01L23/12
代理机构		代理人
主权项
地址

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