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经营范围
发明名称
ENTWICKELVERFAHREN FUER NEGATIVE PHOTOLACKE.
摘要
申请公布号
DE3681697(D1)
申请公布日期
1991.10.31
申请号
DE19863681697
申请日期
1986.11.25
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
ANSCHEL, MORRIS, BINGHAMTON, N.Y. 13903, US;GOODRICH, LAWRENCE DUANE, ENDICOTT N.Y. 13760, US;HETRICK, BARTON MAITLAND, ENDICOTT, N.Y. 13760, US
分类号
H01L21/30;G03F7/30;G03F7/32;H01L21/027;(IPC1-7):G03F7/26
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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