ELEKTRONISCHE SCHALTKREISVORRICHTUNG MIT EINEM DUENNFILMWIDERSTAND UND VERFAHREN ZUM HERSTELLEN DER VORRICHTUNG

摘要

In an electronic circuit device, a thin film resistor is formed on a substrate and includes first regions including one kind of atom such as Cr and exhibiting an electric conductivity and a second region including a compound such as SiO2 composed of two kinds of atoms and exhibiting an insulating property. In the thin film resistor, the first regions are scattered in the second region and have an average particle size of 2 nm to 20 nm.