| 摘要 |
PURPOSE:To obtain a sintered body of superfine particles having low stress, high sintering properties and high adhesivity by irradiating carriers gases with a laser beam just before superfine particles reach the surface of substrate and depositing excited fine particles on the surface of the substrate. CONSTITUTION:Superfine particles formed by production chambers 1, 2 and 3 of superfine particles with every composition, transported into a blender 4 of fine particles with carrier gases such as H2, N2 and He, respectively, pressurized by a pressurizing device 5 and jetted through a nozzle 7 to a substrate 8. In the operation, just before the superfine particles reach the substrate 8, the carrier gases are irradiated with a laser beam from a laser beam generating device 12 and superfine particles excited in high energy state are deposited on the surface of the substrate 8. |
