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发明名称
MANUFACTURE OF THIN FILM SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03241874(A)
申请公布日期
1991.10.29
申请号
JP19900038747
申请日期
1990.02.20
申请人
SEIKO EPSON CORP
发明人
TAKENAKA SATOSHI
分类号
H01L21/20;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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