| 摘要 |
PURPOSE:To decrease the quantity of error by storing the quantity of error due to the distortion of first and second projection optical systems previously for each coordinate, and reading out the quantity of error corresponding to the coordinate of the alignment mark detected by a coordinate detecting means from a storage means, and operating the quantity of correction so as to do correction. CONSTITUTION:A storage means 1o stores the quantity of error due to the distortion of first and second projection optical systems previously for each predetermined coordinates in an image field. Moreover, a coordinate detecting means 1q detects the coordinates within the image fields of the first and second alignment marks 4a and 4b where TTL alignments are executed. And a correction quantity operating means 1p reads out the quantity of error corresponding to the coordinate detected by the coordinate detecting means 1q from the storage means 1o, and operates the quantity of error for correcting the error included in alignment results, and a correction means 1r relatively shifts a wafer and a reticle according to the quantity of correction and corrects the error. Hereby, error in superposition can be suppressed small. |
