| 摘要 |
PURPOSE:To stabilize discharge on the tip parts of electrodes, and improve laser performance, by installing the electrode of two-layered cylindrical structure on the end portion side of an inner discharge tube. CONSTITUTION:When pulse discharge is generated between a cathode 3 and an anode 4 in the atmosphere of discharge gas 15 in an inner discharge tube 5, the inside of the tube 5 is turned into a discharging state. In the case of the electrodes 3, 4 of two layered cylindrical structure, a high potential point (a) is generated on the right side of a discharge generation point (b), so that stable discharge is obtained at the tips of the electrodes 3, 4. The heat generated by the stable discharge travels to the inner discharge tube 5, which is heated. Then metal grains 10 in the tube 5 are fused and vaporized, and metal vapor is generated, thereby obtaining always stable laser oscillation output from a laser window 8. |
