A METHOD OF AND ARRANGEMENT FOR CONTROLLING THE DENSITY OF VAPOUR DEPOSITION FLOW AND/OR ITS DISTRIBUTION,申请号GB19910019398-传众专利搜索

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发明名称	A METHOD OF AND ARRANGEMENT FOR CONTROLLING THE DENSITY OF VAPOUR DEPOSITION FLOW AND/OR ITS DISTRIBUTION
摘要
申请公布号	GB9119398(D0)	申请公布日期	1991.10.23
申请号	GB19910019398	申请日期	1991.09.11
申请人	BAZLERS AG.	发明人
分类号	H01J37/30;C23C14/30;H05B7/00	主分类号	H01J37/30
代理机构		代理人
主权项
地址

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