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发明名称
VAPOR PHASE EPITAXIAL GROWTH SYSTEM
摘要
申请公布号
JPH03237732(A)
申请公布日期
1991.10.23
申请号
JP19900034998
申请日期
1990.02.14
申请人
FUJITSU LTD
发明人
MARUYAMA KENJI;EBE KOJI;SAWADA AKIRA;MURAKAMI SATOSHI
分类号
H01L21/205;H01L21/365
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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