| 摘要 |
<p>PURPOSE:To prevent generation of clouding of the window of a reaction tube and to hold the concn. of gas constant and to extend the range of application by transmitting infrared beams in the pipeline part of a raw material supplying system and controlling the concn. of reactive gas in accordance with the absorbancy thereof. CONSTITUTION:For example, in the case of growing ZnS, gaseous H2S which is diluted to 10% by H2 is introduced into a reaction tube 109 through one side of pipe via an IR monitor 104 for monitoring infrared rays through a mass flow controller (MFC) 106 from a cylinder 103. Further, gaseous H2 being a carrier is sent to a bubbler 101 in a thermostatic chamber 102 via an MFC 107. Diethylzinc generated by bubbling in the bubbler 101 is introduced into the reaction 109 through the other side of pipe via an IR monitor 105. The IR monitors 104, 105 are provided with the absorption cells having windows in the pipeline parts supplying gases. Absorbancy of the gases for infrared beams transmitted through the windows is obtained. The flow rate of the gas is controlled so that the obtained absorbancy is kept constant.</p> |
