| 摘要 |
PURPOSE:To simplify the operation to adjust a slit width by interposing a piezoelectric element of a thickness oscillation mode between the opposite parts of a pair of slit plates and drawing out the lead wires of the piezoelectric element to the outside of a vacuum chamber. CONSTITUTION:A detector body 2 is provided in the vacuum chamber 1 and a pair of the slit plates 3 are disposed on the incident side of the body 2. The piezoelectric element 6 of the thickness oscillation mode is interposed between the edges facing each other of the two slit plates 3, 3. The element 6 exists at both longitudinal ends of the slit plates 3 and the thickness direction therefo is set in the same direction as the transverse direction of the slit so that the thickness of the element 6 corresponds to the slit width. The lead wires 8,... are drawn out of the electrodes of the element 6. These lead wires 8 are led through the outside wall 1a of the vacuum chamber 1 to the outside. An operating part 9 and a high-voltage power source circuit 10 are connected to the part of the lead wires 8 to be led out to the outside of the vacuum chamber 1. |
