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发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03233935(A)
申请公布日期
1991.10.17
申请号
JP19900030242
申请日期
1990.02.08
申请人
MITSUBISHI ELECTRIC CORP
发明人
KONAKAWA YOSHIKO
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
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地址
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