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发明名称
CLEANING UP PROCESS OF MESA TYPE SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH03232227(A)
申请公布日期
1991.10.16
申请号
JP19900027077
申请日期
1990.02.08
申请人
TOSHIBA COMPONENTS CO LTD
发明人
MORIMIYA MAI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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