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发明名称
SOL STABILIZATION METHOD FOR SOL-GEL METHOD AND PRODUCTION OF THIN FILM OF ZIRCONIA SYSTEM BY UTILIZING THIS METHOD
摘要
申请公布号
JPH03232975(A)
申请公布日期
1991.10.16
申请号
JP19900029038
申请日期
1990.02.08
申请人
SUMITOMO METAL IND LTD
发明人
SUITO HIDEAKI;KUDO SETSUKO;INOUE AKIRA;YONETANI AKIYOSHI
分类号
B01J13/00;C23C20/08
主分类号
B01J13/00
代理机构
代理人
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地址
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