发明名称 |
CAPACITIVE DIFFERENTIAL PRESSURE DETECTOR |
摘要 |
The present invention is directed to a capacitive differential pressure detector comprising a diaphragm disposed between two electrodes. In a first embodiment, each of the electrodes comprises two conductive plates with an insulator disposed therebetween. Step-like portions are formed in the conductive plate nearest the diaphragm. In a second embodiment, the plate nearest the diaphragm is insulative with a conductive film formed thereon. In a third embodiment, at least one groove is formed in the plate nearest the diaphragm. The groove is formed in a surface of the plate which faces the diaphragm. The groove also intersects a pressure guide hole. In a fourth embodiment, a substrate is disposed on a surface of the plate farthest from said diaphragm. In a fifth embodiment, an insulating layer has the same coefficient of thermal expansion as the conductive plates. In a sixth embodiment, the diaphragm is etched in order to form a circular flexible part, a centrally disposed displacing part, and a bonding part.
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申请公布号 |
US5056369(A) |
申请公布日期 |
1991.10.15 |
申请号 |
US19900507843 |
申请日期 |
1990.04.12 |
申请人 |
FUJI ELECTRIC CO., LTD. |
发明人 |
TAMAI, MITSURU;YUHARA, TADANORI;NAKAMURA, KIMIHIRO;KITAMURA, KAZUAKI;TAKANO, TOSHIYUKI;TAKAHAMA, TEIZO;MATSUDA, MIKIHIKO;SOUMA, SHINICHI |
分类号 |
G01L13/06;G01L9/00 |
主分类号 |
G01L13/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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