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发明名称
PATTERN DETECTOR
摘要
申请公布号
JPH03229409(A)
申请公布日期
1991.10.11
申请号
JP19900025422
申请日期
1990.02.05
申请人
MATSUSHITA ELECTRON CORP
发明人
TAKENAKA HIROSHI
分类号
H01L21/66;H01L21/027
主分类号
H01L21/66
代理机构
代理人
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