发明名称 |
Electrostatic chuck having tapered electrodes |
摘要 |
An electrostatic chuck is provided with an electrode split into two sections. The separate sections are joined through a tapered joint and bonded using epoxy. An insulator electrically separates the two sections and covers the top of the joined sections to form a clamping surface. The geometry of the electrode forms three annular regions, dividing the clamping surface into two equal areas distributed symmetrically. Moreover, the split-ring electrostatic chuck just described is fabricated by forming the two, separate electrodes; coating the separate electrodes with an insulator; joining the electrodes; machining the joint, top surface of the electrodes to form a single, co-planar, flat, smooth surface; and applying an insulator to that top surface.
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申请公布号 |
US5055964(A) |
申请公布日期 |
1991.10.08 |
申请号 |
US19900579439 |
申请日期 |
1990.09.07 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LOGAN, JOSEPH S.;RUCKEL, RAYMOND R.;TOMPKINS, ROBERT E.;WESTERFIELD, JR., ROBERT P. |
分类号 |
B23Q3/15;H01L21/265;H01L21/302;H01L21/3065;H01L21/683;H02N13/00 |
主分类号 |
B23Q3/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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