Scanning probe microscope.

摘要

A scanning probe microscope comprises a cantilever (7) having a conductive probe (7a) positioned near a sample (1), an actuator (2) for moving the sample to and away the probe, a circuit (3) for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit (8) for detecting the produced tunnel current, a circuit (9) for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit (11) for providing the actuator for feedback in response to the output signals from the circuit (9) to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit (14) for forming an STS image data from the detected tunnel current a circuit (15) for forming an STM image data from the detected tunnel current, and a circuit (11) for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.