| 摘要 |
PURPOSE:To obtain a sintered substrate of alumina sintered <= at the optimum burning strength, having excellent durability by blending alumina containing a given amount of alkali metal and/or alkaline earth metal and a given amount of SiO2 with a prescribed amount of partially stabilized ZrO2 having a given amount of solid solution of oxide such as Y2O3 or Sc2O3. CONSTITUTION:Heater electrodes are formed and a sintered substrate of alumina to be burnt simultaneously with the heater electrodes is constituted as follows. Namely, the raw material of the substrate is obtained by blending alumina containing >=0.1wt.% alkali metal and/or alkaline earth metal and <=1.0wt.% SiO2 with 2-18wt.% of the following partially stabilized ZrO2. In this case, the ZrO2 must contain 2-6mol% one or more metallic oxides of Y2O3, Sc2O3 and La series. The sintered substrate of alumina can make a sintering material thereof having <=1,520 deg.C optimum burning temperature, surely avoid segregation and migration of impurities, chipping, etc., and improve durability. |
