POSITIONER TO THE PRODUCTION OF THE SEMICONDUCTOR ELEMENTS

摘要

The invention relates to a positioning device for the production of semiconductor components, particularly for wire bonding apparatuses, which positioning device is comprised of a cross table and separate x-direction and y-direction drive units. According to the invention, the two drive units, each comprised of a drive motor with an excursion measuring system (1; 17) affixed to the frame via a support plate (2; 18) are disposed in a parallel orientation. Each support plate (2; 18) also bears a bearing (3; 19) for a drive spindle (5; 20). A drive nut (6; 22) is disposed on the drive spindle (5; 20), where the nut is nonrotatably fixed. A vertical bearing (8) is mounted on the support plate (2), which bearing bears two adjustable levers (9, 11) oriented at a mutual 90 DEG angle, wherein the lever (9) is connected to the drive nut (6), and the lever (11) is connected to a x-direction guide a mechanism. A vertical bearing (24) attached to the support plate (18) bears a double lever (25), the main lever (26) of which is connected to the drive nut (22). The main lever (26) and the second lever (30) both bear rolling bearings which engage a guide rail (29) affixed to the cross table. The invention enable increased operating speeds because of decreased moving mass. The positioning device is well adapted to production devices.