| 摘要 |
PURPOSE:To obtain a thin film layer having a taper-shaped step part at the boundary part by a method wherein a stencil containing a photo resist layer or an electron beam resisting layer is formed on a substrate, and after slanting evaporation is applied making the substrate thereof to perform a rotation and moreover to perform revolution, the resist layer is lifted off. CONSTITUTION:A superconducting metal layer 73 is formed on the substrate 72, and the reverse bevel structural stencil 71 is provided thereto containing the resist layer. The stencil 71 is made to face toward the lower side in condition as it is, the substrate 72 is made to perform the rotation, or when the substrates 72 of the plural number are put there, the substrates are put in parallel and are made to perform the rotation and revolution, a bam of evaporation matter is injected from the aslant lower part, and insulator layers 75, 74 are made to be adhered respectively on the surface of the stencil 71, on the surfaces of the metal layer 73 surrounding the stencil 71 and the substrate 72 protruding from the circumference thereof. After then, the stencil 71 is removed together with the layer 75 on the surface thereof to obtain the circular layer 74 generating the taper-shaped step part at the central boundary part, and is made as suitable for the manufacturing process of Josephson IC. |
