| 摘要 |
PURPOSE:To open desired round holes on diaphragms at high efficiency and high accuracy by a method wherein the positioning of grindstone is performed based on a working program by using an arithmetic control device, when round hole working is performed to the material for a pressure sensor using grindstone. CONSTITUTION:A fixed board 11 is mounted on a base 10, an X table 13, a Y table 19 and Z talle 30 are arranged thereon, then a workpiece holder 25 is provided therebetween, and a workpiece 26 is mounted thereon. On the Z table 30, a cylindrical supporting body 39 having a low speed spindle 37 and a high speed speindle 42 having the cup formed grindstone 43 at the top end are arranged. Thus, a grinding part is constituted of the low speed spindle 37, a bearing body 39, the supporting body 39, an eccentric bearing 41, the high speed spindle 42, and the grindstone 43, thus X, Y, and Z step motors 16, 23, and 36 are controlled by the arithmetic control part constituted of a microcomputer, etc., and then the grindstone 43 is made to face to the desired hole opening position of the workpiece 26. |
