发明名称 PHOTOREACTIVE RESIN COMPOSITE DEVELOPABLE BY SEMI-WATER SOLUTION
摘要 PURPOSE: To obtain a resin compsn. developable with a semiaq. soln. by using partially esterified arom. polyamic acid resin contg. photoreactive parts in the ester groups by about 5-75wt.% based on the weight of a compsn. CONSTITUTION: Partially esterified arom. polyamic acid resin contg. photoreactive parts in the ester groups is used by about 5-75wt.% based on the weight of a compsn. The polyamic acid resin is represented by formula I, wherein→shows isomerism, R is an arom. group, R1 is an aliphatic, arom. or alicyclic group, R2 is H or an org. group contg. a photopolymerizable olefinic double bond, about 5-80% of the substituents R2 are H and (n) is a sufficiently large positive integer to obtain resin whose average mol. wt. is about 1,000-75,000. The objective resin compsn. developable with a semiaq. soln. is obtd.
申请公布号 JPH03220558(A) 申请公布日期 1991.09.27
申请号 JP19900255016 申请日期 1990.09.25
申请人 E I DU PONT DE NEMOURS & CO 发明人 ARAN II NEIDAA;MAIKERU II POTSUTEIGAA
分类号 G03F7/004;C08F290/00;C08F299/00;C08G73/10;C08L79/08;G03F7/038;H01L21/027 主分类号 G03F7/004
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